{"title":"Constant di/dz scanning tunneling microscopy: Atomic precision imaging and hydrogen depassivation lithography on a Si(100)-2 × 1:H surface.","authors":"Richa Mishra, S O Reza Moheimani","doi":"10.1063/5.0239000","DOIUrl":null,"url":null,"abstract":"<p><p>We introduce a novel control mode for Scanning Tunneling Microscope (STM) that leverages di/dz feedback. By superimposing a high-frequency sinusoidal modulation on the control signal, we extract the amplitude of the resulting tunneling current to obtain a di/dz measurement as the tip is scanned over the surface. A feedback control loop is then closed to maintain a constant di/dz, enhancing the sensitivity of the tip to subtle surface variations throughout a scan. This approach offers distinct advantages over conventional constant-current imaging. We demonstrate the effectiveness of this technique through high-resolution imaging and lithographic experiments on several Si(100)-2 × 1:H surfaces. Our findings, validated across multiple STM systems and imaging conditions, pave the way for a new paradigm in STM control, imaging, and lithography.</p>","PeriodicalId":21111,"journal":{"name":"Review of Scientific Instruments","volume":"96 1","pages":""},"PeriodicalIF":1.3000,"publicationDate":"2025-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Review of Scientific Instruments","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1063/5.0239000","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
We introduce a novel control mode for Scanning Tunneling Microscope (STM) that leverages di/dz feedback. By superimposing a high-frequency sinusoidal modulation on the control signal, we extract the amplitude of the resulting tunneling current to obtain a di/dz measurement as the tip is scanned over the surface. A feedback control loop is then closed to maintain a constant di/dz, enhancing the sensitivity of the tip to subtle surface variations throughout a scan. This approach offers distinct advantages over conventional constant-current imaging. We demonstrate the effectiveness of this technique through high-resolution imaging and lithographic experiments on several Si(100)-2 × 1:H surfaces. Our findings, validated across multiple STM systems and imaging conditions, pave the way for a new paradigm in STM control, imaging, and lithography.
期刊介绍:
Review of Scientific Instruments, is committed to the publication of advances in scientific instruments, apparatuses, and techniques. RSI seeks to meet the needs of engineers and scientists in physics, chemistry, and the life sciences.