{"title":"Enhancing the Capacitive Memory Window of HZO FeCap Through Nanolaminate Stack Design","authors":"Mostafa Habibi, Alireza Kashir, Seungyeol Oh, Hojung Jang, Hyunsang Hwang","doi":"10.1002/aelm.202400764","DOIUrl":null,"url":null,"abstract":"Recently, a capacitive array based on Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> (HZO) has been proposed as an alternative to conventional resistive crossbar arrays for compute-in-memory (CIM). This array operates through a capacitive memory window (CMWε). This arises due to interface asymmetry caused by varying defect densities at the top and bottom interfaces. However, the current CMWε is insufficient, necessitating strategies to enhance it. In this study, the impact of stack design on CMWε is examined and it is demonstrated that it is possible to precisely control critical fields in <i>I–V</i> curves to achieve a significantly higher CMWε. A record high CMWε is achieved through an innovative nanolaminate design. The observed characteristics are explained by the Landau-Ginzburg-Devonshire (LGD) model and the presence of extra critical fields during <i>I–V</i> sweep. The final device exhibits excellent uniformity and high-speed operation. Additionally, a substantial memory window for a non-destructive read operation (NDRO) is confirmed using AC pulses. Alongside detailed electrical characterization, TEM and XRD analyses for an in-depth investigation is employed to uncover the root cause of the superior characteristics achieved. Ultimately, for analog vector-matrix multiplication (VMM) in a capacitive array, the carefully designed nanolaminate stack significantly outperforms HZO (0.5) in both output voltage and voltage swing.","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"87 1","pages":""},"PeriodicalIF":5.3000,"publicationDate":"2024-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Electronic Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1002/aelm.202400764","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Recently, a capacitive array based on Hf0.5Zr0.5O2 (HZO) has been proposed as an alternative to conventional resistive crossbar arrays for compute-in-memory (CIM). This array operates through a capacitive memory window (CMWε). This arises due to interface asymmetry caused by varying defect densities at the top and bottom interfaces. However, the current CMWε is insufficient, necessitating strategies to enhance it. In this study, the impact of stack design on CMWε is examined and it is demonstrated that it is possible to precisely control critical fields in I–V curves to achieve a significantly higher CMWε. A record high CMWε is achieved through an innovative nanolaminate design. The observed characteristics are explained by the Landau-Ginzburg-Devonshire (LGD) model and the presence of extra critical fields during I–V sweep. The final device exhibits excellent uniformity and high-speed operation. Additionally, a substantial memory window for a non-destructive read operation (NDRO) is confirmed using AC pulses. Alongside detailed electrical characterization, TEM and XRD analyses for an in-depth investigation is employed to uncover the root cause of the superior characteristics achieved. Ultimately, for analog vector-matrix multiplication (VMM) in a capacitive array, the carefully designed nanolaminate stack significantly outperforms HZO (0.5) in both output voltage and voltage swing.
期刊介绍:
Advanced Electronic Materials is an interdisciplinary forum for peer-reviewed, high-quality, high-impact research in the fields of materials science, physics, and engineering of electronic and magnetic materials. It includes research on physics and physical properties of electronic and magnetic materials, spintronics, electronics, device physics and engineering, micro- and nano-electromechanical systems, and organic electronics, in addition to fundamental research.