Silicon Nanomembrane Based Flexible Temperature-Bending Strain Dual-Mode Sensor Decoupled by Fast Fourier Transform

Abstract

Flexible dual-mode sensors that are capable of simultaneously sensing temperature and strain exhibit huge prospects in applications such as health monitoring, human-computer interaction, and intelligent robots. However, decoupling different stimuli accurately still faces severe challenges. In this study, we present a silicon based flexible dual-mode sensor that can be seamlessly attached to human body, enabling precise and real-time acquisition of physiological temperature and strain signals. The fabricated device only contains one sensing unit, with good sensing performances to both temperature and bending strain, including good linearity, high sensitivity, low hysteresis, and long-term stability. In various application scenarios, the fabricated dual-mode sensor can be utilized to monitor respiration, pulse, and body temperature. Moreover, due to different specific response times to temperature and strain, pulse and temperature signals obtained from the wrist can be successfully decoupled through the fast Fourier transform (FFT) and inverse FFT. These presented results offer significant potentials for the development of skin-inspired electronics with simple device structures and multifunctional capabilities.