Effect of Al2O3 on the operation of SiNX-based MIS RRAMs

IF 1.4 4区物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

Solid-state Electronics Pub Date : 2024-11-22 DOI:10.1016/j.sse.2024.109035

A.E. Mavropoulis , N. Vasileiadis , P. Normand , C. Theodorou , G. Ch. Sirakoulis , S. Kim , P. Dimitrakis

引用次数: 0

Abstract

The role of a 3 nm Al₂O₃ layer on top of stoichiometric LPCVD SiN_x MIS RRAM cells is investigated by using various electrical characterization techniques. The conductive filament formation is explained, and a compact model is used to fit the current–voltage curves and find its evolution during each operation cycle. The conduction in SiN_x is also studied.

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Al2O3对sinx基MIS rram运行的影响

通过使用各种电表征技术，研究了化学计量LPCVD SiNx MIS RRAM电池上3nm Al2O3层的作用。解释了导电灯丝的形成过程，并建立了一个紧凑的模型来拟合电流-电压曲线，并求出其在每个运行周期内的演变。研究了SiNx中的传导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Solid-state Electronics 物理-工程：电子与电气

CiteScore

3.00

自引率

5.90%

发文量

212

审稿时长

3 months

期刊介绍： It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.