Wafer-level metal thin film thickness scanning based on multiple probe wavelengths nanosecond transient thermoreflectance

IF 5.2 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY
Guoliang Ma, Biwei Meng, Shaojie Zhou, Yali Mao, Yunliang Ma, Xinglin Xiao, Chao Yuan
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Abstract

The present metal film thickness (dMetal) measurement methods (e.g., profiler and electron microscope) are not able to simultaneously achieve non-invasion, wide measurement range, high-resolution, and wafer-level scanning. In this work, a dMetal measurement method based on multiple probe wavelengths transient thermoreflectance (MW-TTR) is developed. Through a systematic sensitivity discussion, the guidance for reliable dMetal measurement is illustrated theoretically. The realization of measuring different types of metals (Au, Al, Ni, Ti) is achieved with different wavelengths of probe lights. After the rigorous comparison with profiler and picosecond acoustic measurement, the accuracy of measuring nanosized film is verified (∼1% difference). The fitting uncertainties of dMetal are < 5 % for Au and Al metals. The high-throughput wafer-level scanning measurement, with a spatial resolution of ∼ 50 μm, is also realized by integrating automatic displacement control and deep learning fast predicting model into MW-TTR. Spatial mapping of dMetal is consistent with profiler measurement (∼5% deviation in 2000 μm length).
基于多探头波长的晶圆级金属薄膜厚度扫描纳秒瞬态热反射仪
目前的金属膜厚度(dMetal)测量方法(如轮廓仪和电子显微镜)无法同时实现无损伤、宽测量范围、高分辨率和晶圆级扫描。在这项工作中,开发了一种基于多探针波长瞬态热反射(MW-TTR)的 dMetal 测量方法。通过系统的灵敏度讨论,从理论上说明了可靠的 dMetal 测量的指导原则。利用不同波长的探针光实现了对不同类型金属(金、铝、镍、钛)的测量。经过与轮廓仪和皮秒声学测量的严格比较,验证了测量纳米薄膜的准确性(差值∼1%)。对于金和铝金属,dMetal 的拟合不确定性为 5%。通过将自动位移控制和深度学习快速预测模型集成到 MW-TTR 中,还实现了空间分辨率为 ∼ 50 μm 的高通量晶圆级扫描测量。dMetal 的空间映射与轮廓仪测量结果一致(在 2000 μm 长度范围内偏差为 5%)。
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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
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