A diaphragm secondary stress utilization method for increasing the sensitivity of piezoresistive pressure sensors without sacrificing linearity

IF 5.2 2区工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY

Measurement Pub Date : 2024-11-21 DOI:10.1016/j.measurement.2024.116271

Yuanying Zhang , Fengyun Liu , Xiaojing Wang , Xiubing Liang , Zheng Guo , Xiaoliang Luo , Jinjun Deng , Xingxu Zhang , Jian Luo , Binghe Ma

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引用次数: 0

Abstract

Piezoresistive pressure sensors with high sensitivity and linearity are critical for aerospace and other industries, however, attempts to improve sensitivity often reduce linearity. Therefore a diaphragm secondary stress utilization method (DSSUM) is proposed, which can significantly increase sensor sensitivity without sacrificing the linearity. The DSSUM realizes the detection of primary and secondary stresses on the diaphragm through the eight-piezoresistor Wheatstone bridge without changing the structure of the diaphragm. A differential pressure sensor with a measurement range of −15 ∼ 15 kPa has been designed and fabricated based on DSSUM. Comparative test results show that DSSUM can increase the sensitivity of the sensor by 50.32 % to 32.35 mV/kPa while maintaining the linearity at 0.031 %F.S. The repeatability of the sensor is 0.02 %FS, the hysteresis is 0.01 %FS, and the zero drift is 0.052 %FS. By using DSSUM, both wide-range and small-range pressure sensors can increase their sensitivity by more than 50 % without impacting linearity. The DSSUM offers a new method for achieving high-performance pressure sensors and holds potential for wide application.

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在不牺牲线性度的情况下提高压阻式压力传感器灵敏度的膜片二次应力利用方法

具有高灵敏度和线性度的压阻压力传感器对于航空航天和其他行业至关重要，然而，试图提高灵敏度往往会降低线性度。因此，我们提出了一种膜片二次应力利用方法（DSSUM），它能在不牺牲线性度的情况下显著提高传感器的灵敏度。DSSUM 在不改变膜片结构的情况下，通过八压电电阻惠斯通电桥实现了对膜片一次和二次应力的检测。基于 DSSUM 设计和制造了一个测量范围为 -15 ∼ 15 kPa 的压差传感器。对比测试结果表明，DSSUM 可将传感器的灵敏度提高 50.32 %，达到 32.35 mV/kPa，同时线性度保持在 0.031 %F.S.；传感器的重复性为 0.02 %FS，滞后为 0.01 %FS，零点漂移为 0.052 %FS。通过使用 DSSUM，宽量程和小量程压力传感器都能将灵敏度提高 50 % 以上，而不会影响线性度。DSSUM 为实现高性能压力传感器提供了一种新方法，具有广泛的应用潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Measurement 工程技术-工程：综合

CiteScore

10.20

自引率

12.50%

发文量

1589

审稿时长

12.1 months

期刊介绍： Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.