Yuanxin Tan , Haotian Lv , Zengrun Wen , Guanhuai Cheng , Zongcheng Mou , Huaiyi Luo , Yingying Ren , Yang Song , Jian Xu , Ya Cheng , Yangjian Cai
{"title":"Slit shaping technique for femtosecond laser direct write fabrication of two-dimensional symmetric waveguide arrays in silica glass","authors":"Yuanxin Tan , Haotian Lv , Zengrun Wen , Guanhuai Cheng , Zongcheng Mou , Huaiyi Luo , Yingying Ren , Yang Song , Jian Xu , Ya Cheng , Yangjian Cai","doi":"10.1016/j.optlastec.2024.112146","DOIUrl":null,"url":null,"abstract":"<div><div>To obtain low loss, depth-insensitive, 2D waveguide arrays with symmetric circular cross sections in silica glass, we applied slit shaping technique to fabricate waveguides with a low NA water immersion objective lens (10×, 0.3NA). We systematically investigate the influences of slit width, pulse energy, writing speed, the number of scans, processing depth, and spherical aberration on the fabrication resolution. We have applied this technique to write low loss (0.34 dB/cm) single-mode waveguides, 1D (1 × 5) and 2D (5 × 5) waveguide arrays in silica glass substrates. This technique will be useful for entangled quantum photonic integrated circuits and topological photonics.</div></div>","PeriodicalId":19511,"journal":{"name":"Optics and Laser Technology","volume":"182 ","pages":"Article 112146"},"PeriodicalIF":4.6000,"publicationDate":"2024-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Laser Technology","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0030399224016049","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0
Abstract
To obtain low loss, depth-insensitive, 2D waveguide arrays with symmetric circular cross sections in silica glass, we applied slit shaping technique to fabricate waveguides with a low NA water immersion objective lens (10×, 0.3NA). We systematically investigate the influences of slit width, pulse energy, writing speed, the number of scans, processing depth, and spherical aberration on the fabrication resolution. We have applied this technique to write low loss (0.34 dB/cm) single-mode waveguides, 1D (1 × 5) and 2D (5 × 5) waveguide arrays in silica glass substrates. This technique will be useful for entangled quantum photonic integrated circuits and topological photonics.
期刊介绍:
Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication.
The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas:
•development in all types of lasers
•developments in optoelectronic devices and photonics
•developments in new photonics and optical concepts
•developments in conventional optics, optical instruments and components
•techniques of optical metrology, including interferometry and optical fibre sensors
•LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow
•applications of lasers to materials processing, optical NDT display (including holography) and optical communication
•research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume)
•developments in optical computing and optical information processing
•developments in new optical materials
•developments in new optical characterization methods and techniques
•developments in quantum optics
•developments in light assisted micro and nanofabrication methods and techniques
•developments in nanophotonics and biophotonics
•developments in imaging processing and systems