Crystallization behavior of amorphous GST films under an ultrafast laser irradiation

Abstract

The crystallization behaviors of amorphous Ge₂Sb₂Te₅ films induced by an ultrafast laser with a time-shaping Gaussian intensity distribution have been studied. The crystalline regions were characterized using optical microscopy, scanning electron microscopy, atomic force microscopy, and Raman spectroscopy. It is found that the region ablated by a single pulse undergoes recrystallization, with a reflectivity higher than that of the non-ablated crystalline region. While preserving the integrity of the film, the diameter of the region with high and uniform reflectivity induced by burst mode is twice that of a single pulse, and the reflectivity is 3 % higher than the 31 % achieved with a single pulse. Additionally, the energy window for laser-induced crystallization expands with an increasing number of burst pulses; specifically, it increases by approximately 2.4 times when the number of sub-pulses is 4 or 5. The Raman results at low pulse energy show a high peak intensity at the 105 cm⁻¹ in related to the vibrations of Te-rich tetrahedra, indicating that the degree of crystallinity in the burst mode region is superior to that achieved with single pulse irradiation. Furthermore, the blue shift of this Raman peak with increased pulse energy further supports that burst mode provides sufficient time for nucleation growth. This work offers insights into achieving more controllable crystallization, which can enhance its applications in phase change memory and other reconfigurable devices.