Spatially Resolved Conductivity of Rectangular Interconnects Considering Surface Scattering—Part II: Circuit-Compatible Modeling

Abstract

In Part I of this work, we had presented a spatially resolved model for conductivity of interconnects capturing surface scattering based on the well-known Fuchs-Sondheimer (FS) approach. However, the proposed spatially resolved FS (SRFS) model involves computing complicated integrals making it ill-suited for circuit simulations. In this part, we build upon our SRFS model to develop a circuit-compatible conductivity model for rectangular interconnects accounting for 2-D surface scattering. The proposed circuit-compatible model offers spatial resolution of conductivity as well as explicit dependence on the physical parameters such as electron mean free path ( $\lambda _{{0}}$ ), specularity (p), and interconnect geometry. We validate our circuit-compatible model over a range of physical parameters showing a close match with the physical SRFS model proposed in Part I (with error <0.7%). We also compare our circuit-compatible model with a previous spatially resolved analytical model (appropriately modified for a fair comparison) and show that our model captures the spatial resolution of conductivity and the dependence on physical parameters more accurately. Finally, we present a semi-analytical equation for the average conductivity based on our circuit-compatible model.