Structural and morphological properties of CeO2 films deposited by radio frequency magnetron sputtering for back-end-of-line integration

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Thin Solid Films Pub Date : 2024-10-05 DOI:10.1016/j.tsf.2024.140547

Ahsan Hayat , Markus Ratzke , Carlos Alvarado Chavarin , Marvin H. Zoellner , Agnieszka Anna Corley-Wiciak , Markus Andreas Schubert , Christian Wenger , Inga A. Fischer

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引用次数: 0

Abstract

Cerium oxides have potential applications ranging from low-temperature gas sensing to photodetection. A back-end-of-line integration of the material into complementary metal-oxide-semiconductor device fabrication processes has many advantages but places limits on material deposition, most notably the thermal budget for deposition and annealing. Here, we investigate thin cerium oxide films deposited by radio frequency (RF) magnetron sputtering at substrate temperatures of 300 °C and RF magnetron powers between 30 W and 70 W without any post-deposition annealing steps. Our investigation of the structural and morphological properties reveals a columnar texture of the thin films, and we find that the material is composed predominantly of CeO₂ (111), with a large degree of crystallinity. We discuss implications for resistive gas sensing applications.

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用于后端集成的射频磁控溅射沉积 CeO2 薄膜的结构和形态特性

铈氧化物的潜在应用范围从低温气体传感到光电探测。将这种材料后端集成到互补金属氧化物半导体器件制造工艺中具有许多优势，但也对材料沉积造成了限制，其中最主要的是沉积和退火的热预算。在此，我们研究了通过射频（RF）磁控溅射沉积的氧化铈薄膜，该薄膜的基底温度为 300 °C，射频磁控功率为 30 W 至 70 W，无需任何沉积后退火步骤。我们对结构和形态特性的研究发现，薄膜具有柱状纹理，而且材料主要由 CeO2 (111) 组成，具有很高的结晶度。我们讨论了电阻式气体传感应用的意义。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.