Junying Li , Lichun Wang , Xinru Xu , Kunhao Lei , Bo Tang , Hao Dai , Jiaxin Zhang , Jialing Jian , Yuting Ye , Hui Ma , Jianghong Wu , Ye Luo , Zequn Chen , Yuexin Yin , Chunlei Sun , Daming Zhang , Lan Li , Hongtao Lin
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引用次数: 0
Abstract
Deposited photonics represents a promising avenue for monolithic back-end integration on CMOS, yet encounters challenges in simultaneously enhancing waveguide loss and modulation dynamics. In this paper, a novel amorphous/polycrystalline hybrid scheme for deposited silicon photonics on CMOS was proposed, which utilizes mask-assisted local laser annealing to crystallize the active region of low-loss amorphous silicon (α-Si) PICs only into high-mobility polycrystalline silicon (poly-Si). The feasibility of key techniques such as laser annealing of α-Si thin films, laser activation of doping ions, and mask-assisted local laser annealing of photonic devices is validated. A comparative study between excimer laser annealing and solid-state laser annealing of α-Si is conducted, examining the impacts of pre-dehydrogenation, doping, etching depth, laser pulse energy density, and pulse number. During mask-assisted laser annealing the necessity of a buffer layer between the mask and the α-Si to prevent metal contamination is highlighted. The mask-assisted local laser annealing technique effectively mitigates the optical loss increase by ∼140 dB/cm typically associated with laser crystallization in a α-Si racetrack resonator and reduces the coupling loss in grating couplers by ∼8 dB/pair. Mask-assisted laser annealing not only facilitates high-yield wafer-level active deposited photonics but also allows for leveraging the strengths of both α-Si and poly-Si within a single photonic integrated circuit. This work provides technological insights and valuable guidance for the development of high-performance deposited silicon photonics.
期刊介绍:
Optics & Laser Technology aims to provide a vehicle for the publication of a broad range of high quality research and review papers in those fields of scientific and engineering research appertaining to the development and application of the technology of optics and lasers. Papers describing original work in these areas are submitted to rigorous refereeing prior to acceptance for publication.
The scope of Optics & Laser Technology encompasses, but is not restricted to, the following areas:
•development in all types of lasers
•developments in optoelectronic devices and photonics
•developments in new photonics and optical concepts
•developments in conventional optics, optical instruments and components
•techniques of optical metrology, including interferometry and optical fibre sensors
•LIDAR and other non-contact optical measurement techniques, including optical methods in heat and fluid flow
•applications of lasers to materials processing, optical NDT display (including holography) and optical communication
•research and development in the field of laser safety including studies of hazards resulting from the applications of lasers (laser safety, hazards of laser fume)
•developments in optical computing and optical information processing
•developments in new optical materials
•developments in new optical characterization methods and techniques
•developments in quantum optics
•developments in light assisted micro and nanofabrication methods and techniques
•developments in nanophotonics and biophotonics
•developments in imaging processing and systems