Ye Jin Kim, Jung Ho Song, Ki Hwan Cho, Jong Hyeon Shin, Jong Sik Kim, Jung Sik Yoon, Sang Jeen Hong
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引用次数: 0
Abstract
Existing etch endpoint detection (EPD) methods, primarily based on single wavelengths, have limitations, such as low signal-to-noise ratios and the inability to consider the long-term dependencies of time series data. To address these issues, this study proposes a context of time series data using long short-term memory (LSTM), a kind of recurrent neural network (RNN). The proposed method is based on the time series data collected through optical emission spectroscopy (OES) data during the SiO2 etching process. After training the LSTM model, the proposed method demonstrated the ability to detect the etch endpoint more accurately than existing methods by considering the entire time series. The LSTM model achieved an accuracy of 97.1% in a given condition, which shows that considering the flow and context of time series data can significantly reduce the false detection rate. To improve the performance of the proposed LSTM model, we created an attention-based LSTM model and confirmed that the model accuracy is 98.2%, and the performance is improved compared to that of the existing LSTM model.
ElectronicsComputer Science-Computer Networks and Communications
CiteScore
1.10
自引率
10.30%
发文量
3515
审稿时长
16.71 days
期刊介绍:
Electronics (ISSN 2079-9292; CODEN: ELECGJ) is an international, open access journal on the science of electronics and its applications published quarterly online by MDPI.