A novel method to determine bias-dependent source and drain parasitic series resistances in AlGaN/GaN high electron mobility transistors

IF 1.4 4区 物理与天体物理 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
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引用次数: 0

Abstract

The AlGaN/GaN high electron mobility transistors (HEMTs) with T-gate that suitable for high frequency applications were fabricated. A novel method to extract the bias-dependent source and drain parasitic series resistances (Rs and Rd) of AlGaN/GaN HEMTs is proposed. By analyzing the distributed capacitance and current generator network in the velocity saturated regions of the AlGaN/GaN HEMTs, a new restriction relationship between small-signal equivalent circuit elements is found. The Rs and Rd can be determined under active bias through wideband S-parameter measurements, which can better reflect the physical mechanism of AlGaN/GaN HEMTs under normal operation. The S-parameters and extrinsic transconductance calculated based the small-signal equivalent circuit element values extracted by the method proposed in this paper are very consistent with the experimental values, which reflects the accuracy of this element extraction method. In this paper, the physical mechanism that causes Rs and Rd to vary with bias voltage is also studied. This study has a deeper insight into the bias-dependence of Rs and Rd, which modifies the understanding for physical mechanisms of AlGaN/GaN HEMTs. The research results provide new ideas for establishing small-signal equivalent circuit models containing more physical effects and is of great significance to GaN-based integrated circuit design.

确定氮化铝/氮化镓高电子迁移率晶体管中与偏置有关的源极和漏极寄生串联电阻的新方法
我们制造出了适合高频应用的带 T 型栅极的 AlGaN/GaN 高电子迁移率晶体管 (HEMT)。本文提出了一种提取 AlGaN/GaN HEMT 与偏置有关的源极和漏极寄生串联电阻(Rs 和 Rd)的新方法。通过分析 AlGaN/GaN HEMT 速度饱和区域的分布电容和电流发生器网络,发现了小信号等效电路元件之间的新限制关系。通过宽带 S 参数测量,可以确定有源偏压下的 Rs 和 Rd,从而更好地反映 AlGaN/GaN HEMT 正常工作时的物理机制。根据本文提出的方法提取的小信号等效电路元件值计算出的 S 参数和外超导与实验值非常一致,反映了这种元件提取方法的准确性。本文还研究了导致 Rs 和 Rd 随偏置电压变化的物理机制。这项研究对 Rs 和 Rd 的偏置依赖性有了更深入的了解,从而修正了对 AlGaN/GaN HEMT 物理机制的理解。研究成果为建立包含更多物理效应的小信号等效电路模型提供了新思路,对基于氮化镓的集成电路设计具有重要意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Solid-state Electronics
Solid-state Electronics 物理-工程:电子与电气
CiteScore
3.00
自引率
5.90%
发文量
212
审稿时长
3 months
期刊介绍: It is the aim of this journal to bring together in one publication outstanding papers reporting new and original work in the following areas: (1) applications of solid-state physics and technology to electronics and optoelectronics, including theory and device design; (2) optical, electrical, morphological characterization techniques and parameter extraction of devices; (3) fabrication of semiconductor devices, and also device-related materials growth, measurement and evaluation; (4) the physics and modeling of submicron and nanoscale microelectronic and optoelectronic devices, including processing, measurement, and performance evaluation; (5) applications of numerical methods to the modeling and simulation of solid-state devices and processes; and (6) nanoscale electronic and optoelectronic devices, photovoltaics, sensors, and MEMS based on semiconductor and alternative electronic materials; (7) synthesis and electrooptical properties of materials for novel devices.
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