Solvent-free Cu sintering pastes using acidic activators

IF 1.6 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Seong-ju Han , Gun-woo Park , Keon-Soo Jang
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引用次数: 0

Abstract

This study delves into the critical evaluation of solvent-free liquid-type acidic additives for their effectiveness in the copper (Cu) sintering process, a crucial method for achieving robust electrical and thermal connections in semiconductor packaging. Sintering is a process of compacting and forming a solid mass of material by heat and/or pressure without melting to the point of liquefaction. It plays an essential role in the manufacturing of electronic components. It creates highly conductive pathways necessary for the reliable performance of semiconductor devices. However, the presence of an oxide layer on Cu surfaces poses a remarkable challenge by impeding thermal and electrical conductivity, thus necessitating the removal of this layer to enhance the performance of sintered components. The study primarily focused on the application of various liquid-type acidic additives, namely, formic acid (FA), acetic acid (AA), hexanoic acid (HA), lactic acid (LA), hydrochloric acid (HcA), and sulfuric acid (SA) to achieve solvent-free sintering and to ascertain their efficiency in oxide layer removal and their impact on the thermal and electrical properties of the sintered Cu chips. Through a series of analytical methods, including thermogravimetric analysis (TGA), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM), and lab shear strength tests, the study revealed significant insights into the thermal stability, oxide layer removal efficiency, and connectivity between Cu particles. Our findings demonstrated that FA and LA additives markedly enhanced the sintering quality by effectively removing the Cu oxide layer, thereby facilitating superior particle connectivity and improving the thermal and electrical conductivities of sintered Cu chips. By contrast, HA, HcA, and SA were less effective, largely because of their inability to remove the oxide layer adequately and their tendency to leave organic residues, resulting in lower mechanical integrity of the sintered Cu chips. The superior performance of FA and LA was attributed to their optimal thermal properties and the high concentration of carboxylic groups capable of efficiently reducing the oxide layer on Cu surfaces. This study contributed to the optimization of the Cu sintering process by identifying effective acidic additives that enhanced the mechanical, thermal, and electrical properties of sintered Cu chips. These findings hold significant promise for advancing semiconductor packaging technologies by providing insights into selecting suitable sintering additives for developing high-performance electronic components.

使用酸性活化剂的无溶剂铜烧结浆料
本研究深入探讨了无溶剂液态酸性添加剂在铜(Cu)烧结工艺中的有效性,铜(Cu)烧结工艺是实现半导体封装中稳固的电气和热连接的关键方法。烧结是一种通过热量和/或压力压实和形成固态材料的工艺,但不会熔化至液化。它在电子元件制造过程中起着至关重要的作用。它能形成半导体器件可靠性能所需的高导电通道。然而,铜表面氧化层的存在阻碍了热传导和电传导,因此必须去除氧化层以提高烧结元件的性能,这对我们提出了严峻的挑战。本研究主要关注各种液态酸性添加剂(即甲酸 (FA)、乙酸 (AA)、己酸 (HA)、乳酸 (LA)、盐酸 (HcA) 和硫酸 (SA))的应用,以实现无溶剂烧结,并确定其去除氧化层的效率及其对烧结铜芯片热性能和电性能的影响。通过一系列分析方法,包括热重分析 (TGA)、X 射线光电子能谱 (XPS)、X 射线衍射 (XRD)、扫描电子显微镜 (SEM) 和实验室剪切强度测试,该研究揭示了热稳定性、氧化层去除效率和铜颗粒之间连接性的重要影响。我们的研究结果表明,FA 和 LA 添加剂通过有效去除铜氧化层显著提高了烧结质量,从而促进了卓越的颗粒连通性并改善了烧结铜芯片的热导率和电导率。相比之下,HA、HcA 和 SA 的效果较差,主要是因为它们无法充分去除氧化层,而且容易留下有机残留物,导致烧结铜芯片的机械完整性降低。FA 和 LA 性能优越,是因为它们具有最佳的热性能和高浓度的羧基,能够有效减少铜表面的氧化层。这项研究通过确定有效的酸性添加剂,提高了烧结铜芯片的机械、热和电气性能,从而为铜烧结工艺的优化做出了贡献。这些发现为开发高性能电子元件选择合适的烧结添加剂提供了启示,从而为推动半导体封装技术的发展带来了重大希望。
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来源期刊
Microelectronics Reliability
Microelectronics Reliability 工程技术-工程:电子与电气
CiteScore
3.30
自引率
12.50%
发文量
342
审稿时长
68 days
期刊介绍: Microelectronics Reliability, is dedicated to disseminating the latest research results and related information on the reliability of microelectronic devices, circuits and systems, from materials, process and manufacturing, to design, testing and operation. The coverage of the journal includes the following topics: measurement, understanding and analysis; evaluation and prediction; modelling and simulation; methodologies and mitigation. Papers which combine reliability with other important areas of microelectronics engineering, such as design, fabrication, integration, testing, and field operation will also be welcome, and practical papers reporting case studies in the field and specific application domains are particularly encouraged. Most accepted papers will be published as Research Papers, describing significant advances and completed work. Papers reviewing important developing topics of general interest may be accepted for publication as Review Papers. Urgent communications of a more preliminary nature and short reports on completed practical work of current interest may be considered for publication as Research Notes. All contributions are subject to peer review by leading experts in the field.
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