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SwinT-ILT: Swin Transformer embedding end-to-end mask optimization model

Journal of Micro/Nanopatterning, Materials, and Metrology Pub Date : 2024-01-30 DOI:10.1117/1.jmm.23.1.013201
Hui Xu, Pan Qi, Fuxin Tang, Ru-Ru Ma, Huaguo Liang, Zhengfeng Huang, Xiaoqing Wen
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SwinT-ILT：Swin 变换器嵌入端到端掩码优化模型
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Journal of Micro/Nanopatterning, Materials, and Metrology
Journal of Micro/Nanopatterning, Materials, and Metrology
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