Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jiyoon Chang, James Moon, Jun Ye
{"title":"Curvilinear data representation and its impact on file size and lithographic performance","authors":"Jiuning Hu, Adam Lyons, Chris Spence, Kurt Wampler, Mahmoud Mohsen, Yen-Wen Lu, Rachit Gupta, Youping Zhang, Rafael Howell, Jiyoon Chang, James Moon, Jun Ye","doi":"10.1117/1.jmm.23.1.011204","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":505970,"journal":{"name":"Journal of Micro/Nanopatterning, Materials, and Metrology","volume":"110 ","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micro/Nanopatterning, Materials, and Metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.jmm.23.1.011204","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}