Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, G. Freychet, Guillaume Jullien, Julien Ducote, Patrice Gergaud, Delphine Le Cunff
{"title":"Cross-evaluation of critical dimension measurement techniques","authors":"Timothée Choisnet, Abdelali Hammouti, Vincent Gagneur, Jérôme Reche, Guido Rademaker, G. Freychet, Guillaume Jullien, Julien Ducote, Patrice Gergaud, Delphine Le Cunff","doi":"10.1117/1.jmm.23.1.014002","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":499761,"journal":{"name":"Journal of micro/nanopatterning, materials, and metrology","volume":"77 4","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of micro/nanopatterning, materials, and metrology","FirstCategoryId":"0","ListUrlMain":"https://doi.org/10.1117/1.jmm.23.1.014002","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}