Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits

Abstract

With the advent of the highly developed era of 5G, AI, and IoT, the latest generation of ICs is designed with smaller-sized FETs, lower time delays, and reduced power consumption. To address the challenges posed by these advancements, materials with a lower k value than silicon dioxide (low-k, <4.0) are being developed to reduce resistance-capacitance (RC) time delays and power consumption. While low-k materials are still emerging, various material companies continue to introduce innovative low-k products, such as SiLK, Fox, Coral, and Aurora from different companies. Simultaneously, considering proprietary business interests, the processes and materials associated with these products have not been clearly presented. In this report, we employ a novel set of equipment to validate an innovative formulation for synthesizing a low-k silicon dioxide layer. Thickness measurements confirm a higher deposition rate of silicon dioxide layers, with excellent uniformity observed on 8” wafer. Furthermore, the dielectric constant (k) decreases to 2.35, indicating the production of a great low-k material. Additionally, in the formulation of reactants, we avoid the use of silane and organic silane, contributing to improved safety in the facility and effective control of reactant costs. The results highlight an advantageous option for fabricating interconnect layers in ICs.