Strain engineering and strain measurement by spring tethers on suspended epitaxial GaN-on-Si photonic crystal devices

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-01-04 DOI:10.1088/1361-6641/ad1b17

Jun Wang, R. Houdré

引用次数: 0

Abstract

Suspended epitaxial gallium nitride (GaN) on silicon (Si) photonic crystal (PhC) devices suffer from large residual tensile strain, especially for long waveguides, because fine structures tend to crack due to large stress. By introducing spring-like tethers, designed by the combination of a spring network model and finite element method (FEM) simulations, the stress at critical locations was mitigated and the cracking issue was solved. Meanwhile, the tethered-beam structure was found to be potentially a powerful method for high-precision strain measurement in tensile thin films, and in this case, a strain of $2.27(\pm0.01)\times10^{-3}$ was measured in 350 nm epitaxial GaN-on-Si.

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悬浮式硅基氮化镓光子晶体外延器件上的弹簧系杆应变工程和应变测量技术

硅（Si）光子晶体（PhC）上的悬浮外延氮化镓（GaN）器件存在较大的残余拉伸应变，尤其是对于长波导而言，因为精细结构容易因较大应力而开裂。通过将弹簧网络模型和有限元法（FEM）模拟相结合而设计的弹簧式系杆，临界位置的应力得到了缓解，开裂问题得以解决。同时，研究还发现系束结构可能是在拉伸薄膜中进行高精度应变测量的一种强有力的方法，在这种情况下，在 350 nm 的硅基氮化镓外延薄膜中测量到了 2.27(\pm0.01)\times10^{-3}$ 的应变。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.