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Selection approach of critical patterns for calibrating the physical resist model based on spectrum coverage

Journal of micro/nanopatterning, materials, and metrology Pub Date : 2023-10-26 DOI:10.1117/1.jmm.22.4.043201
Jiashuo Wang, Lisong Dong, Xiaojing Su, Yajuan Su, Xu Ma, Yayi Wei
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基于频谱覆盖标定物理抗蚀模型的关键模式选择方法
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Journal of micro/nanopatterning, materials, and metrology
Journal of micro/nanopatterning, materials, and metrology
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