LixCoyOz thin-films deposition through thermal atomic layer deposition

IF 2.4 3区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS
Antoine Peisert, Noureddine Adjeroud, Damien Lenoble, Guillaume Lamblin
{"title":"LixCoyOz thin-films deposition through thermal atomic layer deposition","authors":"Antoine Peisert, Noureddine Adjeroud, Damien Lenoble, Guillaume Lamblin","doi":"10.1116/6.0002863","DOIUrl":null,"url":null,"abstract":"3D-Li ion batteries are identified as one of the most promising technologies for improving portable and safe energy storage devices. One of the main remaining challenges to be tackled in that regard is the manufacture of efficient nanostructured electrode materials. In this paper, we report on the first realization of an electrochemically active cathodic LixCoyOz material grown via a thermal atomic layer deposition process based on the combination of Co(thd)2 and Li(thd) organometallic ligands and O3 as an oxidizing agent. Comprehensive characterizations comprising XPS, Raman, HIM (helium ion microscopy)-SIMS, and the first ever SEM images of a thermal-atomic layer deposition (ALD) deposited LixCoyOz material are shown and discussed as well and the very first electrochemical results to attest the electrochemical activity of the deposited material. Those results act as the first demonstration that lithiated materials and more precisely, LixCoyOz, can be grown via an advanced thermal ALD.","PeriodicalId":17490,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"213 1","pages":"0"},"PeriodicalIF":2.4000,"publicationDate":"2023-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0002863","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}
引用次数: 0

Abstract

3D-Li ion batteries are identified as one of the most promising technologies for improving portable and safe energy storage devices. One of the main remaining challenges to be tackled in that regard is the manufacture of efficient nanostructured electrode materials. In this paper, we report on the first realization of an electrochemically active cathodic LixCoyOz material grown via a thermal atomic layer deposition process based on the combination of Co(thd)2 and Li(thd) organometallic ligands and O3 as an oxidizing agent. Comprehensive characterizations comprising XPS, Raman, HIM (helium ion microscopy)-SIMS, and the first ever SEM images of a thermal-atomic layer deposition (ALD) deposited LixCoyOz material are shown and discussed as well and the very first electrochemical results to attest the electrochemical activity of the deposited material. Those results act as the first demonstration that lithiated materials and more precisely, LixCoyOz, can be grown via an advanced thermal ALD.
通过热原子层沉积法沉积LixCoyOz薄膜
3D-Li离子电池被认为是改进便携式和安全储能设备的最有前途的技术之一。在这方面需要解决的主要挑战之一是制造高效的纳米结构电极材料。在本文中,我们报道了基于Co(thd)2和Li(thd)有机金属配体与O3作为氧化剂的结合,通过热原子层沉积工艺生长出具有电化学活性的阴极LixCoyOz材料。综合表征包括XPS,拉曼,HIM(氦离子显微镜)-SIMS,以及热原子层沉积(ALD)沉积LixCoyOz材料的第一张SEM图像,并展示和讨论了第一个电化学结果,以证明沉积材料的电化学活性。这些结果首次证明,锂化材料,更准确地说,LixCoyOz,可以通过先进的热ALD生长。
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来源期刊
Journal of Vacuum Science & Technology A
Journal of Vacuum Science & Technology A 工程技术-材料科学:膜
CiteScore
5.10
自引率
10.30%
发文量
247
审稿时长
2.1 months
期刊介绍: Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.
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