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New era of logic technology evolution: Z-dimensional scaling

Advanced Etch Technology and Process Integration for Nanopatterning XI Pub Date : 2022-06-13 DOI:10.1117/12.2623261
Dechao Guo
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逻辑技术演进的新时代:z维缩放
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Advanced Etch Technology and Process Integration for Nanopatterning XI
Advanced Etch Technology and Process Integration for Nanopatterning XI
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