A. Serra, G. Bourgeois, M. Cyrille, J. Cluzel, J. Garrione, G. Navarro, E. Nowak
{"title":"Optimization of 3ω Method for Phase-Change Materials Thermal Conductivity Measurement at High Temperature","authors":"A. Serra, G. Bourgeois, M. Cyrille, J. Cluzel, J. Garrione, G. Navarro, E. Nowak","doi":"10.1109/ICMTS.2019.8730993","DOIUrl":null,"url":null,"abstract":"Thermal conductivity (kth) of Ge-rich Ge-Sb-Te phase-change material (GGST) is here investigated at temperatures up to $400\\ ^{\\circ}\\mathrm{C}$ through “3ω method”. We present the engineering of the test vehicle, with the optimization of the metal-based heater to achieve a reliable measurement even at high temperature. Finally, we compare the results from four different approaches, showing which method is more accurate for the kth evaluation in phase-change materials.","PeriodicalId":333915,"journal":{"name":"2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2019.8730993","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Thermal conductivity (kth) of Ge-rich Ge-Sb-Te phase-change material (GGST) is here investigated at temperatures up to $400\ ^{\circ}\mathrm{C}$ through “3ω method”. We present the engineering of the test vehicle, with the optimization of the metal-based heater to achieve a reliable measurement even at high temperature. Finally, we compare the results from four different approaches, showing which method is more accurate for the kth evaluation in phase-change materials.