Reversible Degradation of GaN LEDs Related to Passivation

M. Meneghini, L. Trevisanello, R. Penzo, M. Benedetti, U. Zehnder, U. Strauss, G. Meneghesso, E. Zanoni
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引用次数: 5

Abstract

This paper analyzes the stability of gallium nitride blue light emitting diodes (LEDs) at high temperature levels. It is shown that high temperature storage can induce significant degradation of the electrical and optical characteristics of the samples. The most important failure modes detected after thermal stress are output power decrease, emission crowding and forward voltage increase. The degradation process is attributed to the interaction between hydrogen in the PECVD-deposited SiN passivation layer and the p-side of the diodes. This mechanism induces the deterioration of the characteristics of the metal/semiconductor interface and of the p-type semiconductor layer, as confirmed by the results obtained on transfer length method (TLM) structures on p-GaN submitted to thermal storage. The degradation process has been found to be reversible. In particular it is shown that passivation removal and subsequent annealing are sufficient for an almost complete recovery of the electrical and optical properties of the LEDs. Finally, it is shown that the use of a sputtered SiN passivation layer can be an effective alternative to usually adopted PECVD for the reduction of high temperature instabilities of GaN LEDs, due to its reduced hydrogen content.
与钝化相关的GaN led可逆退化
本文分析了氮化镓蓝色发光二极管(led)在高温下的稳定性。结果表明,高温储存会导致样品的电学和光学特性显著退化。热应力后检测到的主要失效模式是输出功率下降、发射拥挤和正向电压升高。降解过程是由于pecvd沉积的SiN钝化层中的氢与二极管p侧的相互作用。这一机制导致了金属/半导体界面和p型半导体层特性的恶化,这一点得到了传递长度法(TLM)结构在p-GaN上进行热存储的结果的证实。降解过程是可逆的。特别是表明,钝化去除和随后的退火足以几乎完全恢复led的电学和光学性质。最后,研究表明,由于减少了氢含量,使用溅射SiN钝化层可以有效地替代通常采用的PECVD,以降低GaN led的高温不稳定性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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