Tatsuya Aramaki, Ryuki Nomura, T. Matsuda, M. Kimura, K. Umeda, M. Uenuma, Y. Uraoka
{"title":"Thermoelectric Conversion Devise Using Ga-Sn-O Thin Film Prepared by Mist CVD Method","authors":"Tatsuya Aramaki, Ryuki Nomura, T. Matsuda, M. Kimura, K. Umeda, M. Uenuma, Y. Uraoka","doi":"10.1109/IMFEDK.2018.8581956","DOIUrl":null,"url":null,"abstract":"We proposed a GTO thin film thermoelectric conversion devise by the mist CVD method. The thermoelectric conversion devise with the best performance had a Seebeck coefficient of −193[µV/K], a conductivity of 6.35[S/cm], and a PF of 0.0179 [mW/mK2].","PeriodicalId":434417,"journal":{"name":"2018 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMFEDK.2018.8581956","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We proposed a GTO thin film thermoelectric conversion devise by the mist CVD method. The thermoelectric conversion devise with the best performance had a Seebeck coefficient of −193[µV/K], a conductivity of 6.35[S/cm], and a PF of 0.0179 [mW/mK2].