Thermoelectric Conversion Devise Using Ga-Sn-O Thin Film Prepared by Mist CVD Method

Tatsuya Aramaki, Ryuki Nomura, T. Matsuda, M. Kimura, K. Umeda, M. Uenuma, Y. Uraoka
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Abstract

We proposed a GTO thin film thermoelectric conversion devise by the mist CVD method. The thermoelectric conversion devise with the best performance had a Seebeck coefficient of −193[µV/K], a conductivity of 6.35[S/cm], and a PF of 0.0179 [mW/mK2].
雾相气相沉积法制备的Ga-Sn-O薄膜热电转换装置
提出了一种采用雾状CVD法的GTO薄膜热电转换装置。性能最佳的热电转换器件的塞贝克系数为−193[µV/K],电导率为6.35[S/cm], PF为0.0179 [mW/mK2]。
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