Wafer-level Re-Packaging of Commercial Components for Miniaturization and Embedding

Jens Müller, Markus Hülsmann, N. Gutzeit, M. Fischer
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引用次数: 1

Abstract

Integrated circuits packaged as commercial of the shelf components (COTS) are usually designed for robust handling in standard SMT-processes. They are often too bulky to be embedded in a multilayer PCB and pose limitations for higher component densities on boards. On the other hand, bare dies which could be applied as FlipChip or Chip-on-Board are often not available for customers with medium or low volume products. The suggested technology provides an option to address this issue by a re-packaging process of wire bonded or Au-FlipChip bonded dies in wafer format. Standard packages are mounted and overmolded on a temporary carrier wafer in a matrix like structure. The wafer is thinned down to reduce package height and to get access to wire bonds or stud bumps. Thin film deposition of adhesion layer and plating base followed by polymer photoresist lithography and electroplating is used to create a redistribution pattern which - depending on the area available – can be fan-in or fan-out type. After stripping of the photoresist and etching of the plating base and adhesion layer solder mask and solder bumps may be applied to achieve a SMT-compatible component. Finally, the individual packages are separated by wafer sawing. For packages intended to be used for PCB embedding solder mask and bumping processes are skipped. The entire process is demonstrated based on a Small Outline package with the dimensions 5 mm × 6.3 mm × 1.75 mm (length, width, height). The re-packaged component has a lateral size of 3.2 × 3.2 mm2 and a height of 0.35 mm.
商用元件的晶圆级再封装小型化与嵌入
封装为商用货架组件(COTS)的集成电路通常设计用于在标准smt工艺中进行稳健处理。它们通常太笨重,无法嵌入多层PCB中,并且限制了电路板上更高的组件密度。另一方面,可以应用于FlipChip或Chip-on-Board的裸模通常不适用于中批量或小批量产品的客户。建议的技术提供了一种解决这一问题的选择,通过在晶圆格式中重新封装线键合或Au-FlipChip键合芯片。标准封装在一个临时载体晶圆上以类似矩阵的结构被安装和覆盖。晶圆片变薄,以减少封装高度,并获得电线键或螺柱凸起。附着层和电镀基底的薄膜沉积,然后是聚合物光刻胶光刻和电镀,用于创建再分配图案,根据可用面积,可以是扇入型或扇出型。在剥离光刻胶并蚀刻镀基和粘附层之后,可以应用阻焊和焊点来实现smt兼容组件。最后,通过锯片将单个包装分开。对于用于PCB嵌入阻焊和碰撞过程的封装,跳过。整个过程是基于一个尺寸为5毫米× 6.3毫米× 1.75毫米(长、宽、高)的小轮廓包进行演示的。重新封装后的组件横向尺寸为3.2 × 3.2 mm2,高度为0.35 mm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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