Model order reduction for nonlinear modal analysis of MEMS devices: theory and recent advancements

Abstract

Designing resonating components as MEMS gyroscopes, micromirrors, and resonators requires accurate prediction of their nonlinear dynamic response. This ensures avoiding undesired effects as hardening/softening behaviour and internal resonance. However, computing oscillatory stationary states in MEMS systems with high quality factors from finite element models is prohibitively costly from a computational viewpoint, hence model order reduction techniques are necesssary. In the present work we detail computational aspects of model order reduction techniques suitable for MEMS devices exhibiting geometrically nonlinear behaviour, together with numerical results provided by state of the art methods on MEMS components.