Advanced modeling of oxide defects for random telegraph noise

W. Goes, F. Schanovsky, T. Grasser, H. Reisinger, B. Kaczer
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引用次数: 7

Abstract

The results from a recently developed measurement technique, called time-dependent defect spectroscopy (TDDS), have shed new light on reliability issues, such as random telegraph noise (RTN) and the negative bias instability (NBTI). It has been found that established models fail to explain these findings. A refined charge trapping model is suggested by assuming additional metastable defect configurations. Thereby, we can give an explanation for the new TDDS findings while remaining consistent with results obtained from conventional RTN analysis.
随机电报噪声氧化缺陷的先进建模
最近开发的一种测量技术,称为时间相关缺陷光谱(TDDS),其结果为可靠性问题提供了新的思路,例如随机电报噪声(RTN)和负偏压不稳定性(NBTI)。人们发现,已建立的模型无法解释这些发现。通过假设额外的亚稳缺陷构型,提出了一种改进的电荷捕获模型。因此,我们可以解释新的TDDS发现,同时与传统RTN分析结果保持一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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