Overload-proof LTCC differential pressure sensors for high temperature applications

Abstract

This paper present the development of a miniaturized, overload-proof and high-temperature-stable differential pressure sensor in ceramic multilayer technology for requirements in the automotive, aerospace and chemical industries. Currently there is no cost-effective or suitable solution to make on site active signal processing of the relevant parameters pressure and temperature. The main reasons for this are the lack of active high-temperature components (e.g. pressure and temperature transmitters), as well as the missing but necessary high temperature assembly and connection techniques (mechanical structure and electrical contacts >250 °C). Therefore, the aim of the project is to develop an economically viable solution of a high-temperature and overload-resistant ceramic pressure sensor for measurement data at high temperatures (≥300 °C) and to provide these data (high-temperature electronics / AVT).