M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, Robert M. Karl, Peter C Johnsen, N. Jenkins, C. Bevis, Bin Wang, J. Thurston, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane
{"title":"Variable-wavelength tabletop-scale EUV ptychographic complex imaging reflectometry for 3D composition determination (Conference Presentation)","authors":"M. Tanksalvala, Christina L. Porter, Yuka Esashi, Galen P. Miley, Robert M. Karl, Peter C Johnsen, N. Jenkins, C. Bevis, Bin Wang, J. Thurston, Xiaoshi Zhang, S. Cousin, D. Adams, M. Gerrity, H. Kapteyn, M. Murnane","doi":"10.1117/12.2516827","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":331248,"journal":{"name":"Metrology, Inspection, and Process Control for Microlithography XXXIII","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Metrology, Inspection, and Process Control for Microlithography XXXIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2516827","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}