Low cost technology for high frequency bipolar integrated circuits

M. Badila, C. Codreanu, G. Brezeanu
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Abstract

A new low cost technology for high frequency bipolar circuits is proposed. It upgrades a classical "LISA" (Local Implantation Self Aligned) technology using a 14 masks process. The "basic" npn elementary transistor in the new technology has a 2.2 GHz cutoff frequency, and the parasitic elements in circuits are reduced. The performances of the new technology are verified by means of some demonstrator circuits: a "Gilbert" cell with a bandwidth of 700 MHz, and some broadband, high frequency amplifiers.
高频双极集成电路的低成本技术
提出了一种低成本的高频双极电路新技术。它升级了经典的“LISA”(局部植入自对准)技术,使用14个掩模过程。新技术中的“基本”npn基本晶体管具有2.2 GHz的截止频率,并且减少了电路中的寄生元件。通过一些演示电路:带宽为700 MHz的“吉尔伯特”单元和一些宽带高频放大器,验证了新技术的性能。
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