High field emission related thin oxide wearout and breakdown

D. Dumin, S. Mopuri, S. Vanchinathan, R. S. Scott, R. Subramoniam, T. Lewis
{"title":"High field emission related thin oxide wearout and breakdown","authors":"D. Dumin, S. Mopuri, S. Vanchinathan, R. S. Scott, R. Subramoniam, T. Lewis","doi":"10.1109/RELPHY.1994.307844","DOIUrl":null,"url":null,"abstract":"A model describing high voltage induced thin oxide wearout and breakdown in terms of traps generated inside of the oxide by high field emission has been developed. This model has been shown to be able to describe much of the thickness, field, polarity, time and temperature dependences observed during thin oxide wearout and breakdown.<<ETX>>","PeriodicalId":276224,"journal":{"name":"Proceedings of 1994 IEEE International Reliability Physics Symposium","volume":"151 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"36","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RELPHY.1994.307844","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 36

Abstract

A model describing high voltage induced thin oxide wearout and breakdown in terms of traps generated inside of the oxide by high field emission has been developed. This model has been shown to be able to describe much of the thickness, field, polarity, time and temperature dependences observed during thin oxide wearout and breakdown.<>
高场发射引起的薄氧化物磨损和击穿
建立了用高场发射在氧化物内部产生的陷阱来描述高压诱导薄氧化物磨损击穿的模型。该模型已被证明能够描述在薄氧化物磨损和击穿过程中观察到的大部分厚度、场、极性、时间和温度依赖性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信