D. Dumin, S. Mopuri, S. Vanchinathan, R. S. Scott, R. Subramoniam, T. Lewis
{"title":"High field emission related thin oxide wearout and breakdown","authors":"D. Dumin, S. Mopuri, S. Vanchinathan, R. S. Scott, R. Subramoniam, T. Lewis","doi":"10.1109/RELPHY.1994.307844","DOIUrl":null,"url":null,"abstract":"A model describing high voltage induced thin oxide wearout and breakdown in terms of traps generated inside of the oxide by high field emission has been developed. This model has been shown to be able to describe much of the thickness, field, polarity, time and temperature dependences observed during thin oxide wearout and breakdown.<<ETX>>","PeriodicalId":276224,"journal":{"name":"Proceedings of 1994 IEEE International Reliability Physics Symposium","volume":"151 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"36","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RELPHY.1994.307844","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 36
Abstract
A model describing high voltage induced thin oxide wearout and breakdown in terms of traps generated inside of the oxide by high field emission has been developed. This model has been shown to be able to describe much of the thickness, field, polarity, time and temperature dependences observed during thin oxide wearout and breakdown.<>