Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection

Abstract

We propose in this paper the complete study of a bulk micromachined silicon micromirror able to tilt up to /spl plusmn/20/spl deg/ at a relatively high frequency (1 kHz). These structures actuated with particular electrodes could be also used as a digital micromirror up to 35/spl deg/. Their behaviours have been tested in term of static and frequency responses. A non-linear phenomenon has been observed at very large angle. The pressure dependence of the quality factor of the microstructure is reported. Lifetime aspect has also been tested.