Carrier conduction in SiO2/GaN structure with abrupt interface

Abstract

A monolithic GaN power integrated circuit (IC) with power devices, logic, drive, and protection circuits is a candidate system for a future low power consumption power IC. Formation of a high quality GaN MOS interface is a key for realizing the GaN Power IC. Although a good interface property of a SiO2/GaN structure have already reported[1], the SiO2/GaN structure has obvious interfacial Ga-oxide layer. On the other hand, we have established to form a SiO2/GaN interface without an obvious interfacial layer and with a low interface trap density (DIt)[2]. However, carrier conduction in the SiO2/GaN structure with the abrupt interface has not yet been investigated. In this study, characteristics of current density (J) vs oxide field (Eox) in the SiO2 layers formed by the remote-oxygen- plasma enhanced CVD (ROPE-CVD) on a GaN surface were investigated through comparisons of J-Eox characteristics between GaN and Si MOS capacitors.