Simulation environment for semiconductor technology analysis

Abstract

A programmable simulation environment for semiconductor technology analysis is presented. The SIESTA project sets out to combine the advantages of a comfortable, intuitive visual user interface with the flexibility and versatility of a high-level programming language. It is designed to provide a set of framework services to ensure a straight-forward definition of complex technology analysis tasks. Special emphasis has been put on establishing in an object-oriented fashion a uniform and easy-to-use interface for applications and extensions supplied by the user. LISP objects are used to represent basic entities like process steps, process flows, experiments, and agents for design of experiments (DoE), response surface modeling (RSM), and optimization and fitting modules.