MOSFET-array for extracting parameters expressing SPICE-parameter variation

Abstract

Parameters in Pelgrom's model, which express SPICE-model parameter variations, are evaluated using MOSFET array which has 16K DUTs and is made using 65-nm technology. It is found that the parameters expressing the random component of the variation are dominant, and that the parameters expressing the systematic component are mainly determined by the gate-insulator thickness.