2010 International Conference on Microelectronic Test Structures (ICMTS)

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2010 International Conference on Microelectronic Test Structures (ICMTS) - 最新文献

A Balanced-SeeSaw MEMS swing probe for vertical profilometry of deep micro structures

Pub Date : 2010-03-22 DOI: 10.1109/ICMTS.2010.5466858 Y. Mita, J. Pourciel, M. Kubota, Shaojun Ma, S. Morishita, A. Tixier-Mita, T. Masuzawa

Test structures for characterising the integration of EWOD and SAW technologies for microfluidics

Pub Date : 2010-03-22 DOI: 10.1109/ICMTS.2010.5466861 Y. Li, Y. Fu, B. Flynn, W. Parkes, Y. Liu, S. Brodie, J. Terry, L. Haworth, A. Bunting, J. Stevenson, S. Smith, A. Walton

Correlation between Direct Charge Measurement (DCM) and LCR meter on deep submicron CMOS test structure capacitance measurement

Pub Date : 2010-03-22 DOI: 10.1109/ICMTS.2010.5466830 Yasuhiro Miyake, M. Goto, S. Fujii, Hidetoshi Nishimura

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