A novel technique for extraction of thermal conductivity in metallic thin films

Abstract

The frequency-dependent thermal response in 3ω measurement is investigated using transient electro-thermal coupling simulations. Furthermore, the heat flow ratio m(ω), quantifying the deviation degree of Cahill's model, is exploited for extraction of the thermal conductivity of the heater strip itself, which extends the capability of 3ω method to high-thermal-conductivity thin films.