U. Zschieschang, H. Klauk, M. Halik, G. Schmid, W. Radlik, W. Weber
{"title":"Organic thin film transistors with printed gate electrodes","authors":"U. Zschieschang, H. Klauk, M. Halik, G. Schmid, W. Radlik, W. Weber","doi":"10.1109/POLYTR.2002.1020209","DOIUrl":null,"url":null,"abstract":"We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm/sup 2//V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm/sup 2//V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.","PeriodicalId":166602,"journal":{"name":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2nd International IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. POLYTRONIC 2002. Conference Proceedings (Cat. No.02EX599)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/POLYTR.2002.1020209","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm/sup 2//V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm/sup 2//V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.