Organic thin film transistors with printed gate electrodes

U. Zschieschang, H. Klauk, M. Halik, G. Schmid, W. Radlik, W. Weber
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引用次数: 6

Abstract

We have fabricated pentacene thin film transistors on flexible polymeric substrates with gate electrodes prepared using a combination of microcontact printing and selective electroless plating of nickel. These transistors also employ a spin-coated polymer gate dielectric layer patterned by photolithography and dry etching and have a carrier mobility of 0.03 cm/sup 2//V-s, comparable to pentacene transistors with vacuum-deposited gate electrodes. For comparison, we have also fabricated pentacene devices on silicon substrates and obtained carrier mobility as large as 1.3 cm/sup 2//V-s, demonstrating the potential of pentacene thin film transistors for low-cost electronic applications.
带有印刷栅电极的有机薄膜晶体管
我们在柔性聚合物衬底上制备了并五苯薄膜晶体管,其栅极采用微接触印刷和选择性化学镀镍相结合的方法制备。这些晶体管还采用光刻和干蚀刻的自旋涂覆聚合物栅极介电层,载流子迁移率为0.03 cm/sup 2//V-s,与真空沉积栅极的并五苯晶体管相当。相比之下,我们还在硅衬底上制造了并五苯器件,并获得了高达1.3 cm/sup 2//V-s的载流子迁移率,证明了并五苯薄膜晶体管在低成本电子应用中的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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