DFM aware bridge pair extraction for manufacturing test development

Abstract

We propose a novel method to extract bridge pairs for manufacturing test development based on litho hotspots obtained from DFM (Design-For-Manufacturability) litho models. Litho hotspots are locations in a physical layout in which the lithography process margin is relatively small. We use a DFM lithography simulator to identify litho hotspots and map them onto the design database to identify the associated nets. These nets are then used to select prioritized bridging pairs from extracted capacitive coupling based bridge pairs.