Use of Nanoprobing as the Diagnostic Tool for Nanoscaled Devices

Abstract

Nanoprobing plays a crucial role for failure analysis (FA) in the nanometer-region generation nodes by having the capability to detect the failure sites and characterize the electrical behaviour of malfunctional devices for better understanding of the failure mechanisms. It also offers a guide to the necessary physical analysis in identifying the cause of failure. This established electrical failure analysis (EFA) methodology at a localized area helps to accelerate the FA. Its application to few of the front-end issues is highlighted in the paper.