Alternative approaches in growth of polycrystalline InP on Si

W. Metaferia, Yanting Sun, Pritesh Dagur, C. Junesand, S. Lourdudoss
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Abstract

III-V semiconductors are suitable for high efficiency and radiation resistant solar cells. However, the high cost of these materials limited the application of these solar cells only for specialty application. High quality polycrystalline III-V thin films on low cost substrate are the viable solutions for the problem. In this work we demonstrate two new approaches to grow polycrystalline InP on Si(001)substrate. (i) A simple chemical solution route which makes use of deposition of In2O3 on Si and its subsequent phosphidisation and (ii) In assisted growth that involves deposition of In metal on Si and subsequent growth of InP from its precursors in hydride vapor phase epitaxy. Both techniques are generic and can be applied to other semiconductors on low cost and flexible substrates.
在Si上生长多晶InP的替代方法
III-V半导体适用于高效率和抗辐射的太阳能电池。然而,这些材料的高成本限制了这些太阳能电池的应用仅限于特殊用途。在低成本的衬底上制备高质量的多晶III-V薄膜是解决这一问题的可行方法。在这项工作中,我们展示了在Si(001)衬底上生长多晶InP的两种新方法。(i)一种简单的化学溶液途径,利用In2O3在Si上的沉积及其随后的磷化;(ii) In辅助生长,包括在Si上沉积金属In,随后在氢化物气相外延中从其前驱体生长InP。这两种技术都是通用的,可以应用于低成本和柔性衬底的其他半导体。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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