Polyimide-supported AlScN thin films based surface acoustic wave (SAW) delay line for flexible electronics

Abstract

the frequency response of Polyimide-Supported AlScN thin Films based surface acoustic wave (SAW) delay line is investigated. The elastic, dielectric and piezoelectric coefficients of AlScN alloys in the range of Scandium concentration x = 0, 0.125, 0.25 and 0.375 are obtained. It is found that the scandium content has a major impact on the electro-acoustic Properties of AlScN thin films. In addition, the electrical admittance of AlScN-SAW deposited on polyimide sensor is demonstrated for different Scandium concentrations. The resonant frequencies shift down due to the increases of scandium concentration. The obtained results show that flexible SAW based on c-axis AlScN/PI are promising composite structure for high sensitive sensors