Fast and Accurate Automatic Defect CLuster Extraction for Semiconductor Wafers

Abstract

Reduction in integrated circuit (IC) half technology, which will no longer be sustainable by traditional fault isolation and failure analysis techniques. There is an urgent need for diagnostic software tools with (which manifest as clusters) observed from manufacturing defects can be traced back to a specific process, equipment or technology, a novel data mining algorithm defects from test data logs. This algorithm and provides accurate detection of 99%.