Thermal compression bonding for power IC attachment using pure Zn

Chih-Hao Fan, Ting-Jui Wu, Jenn-Ming Song
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Abstract

This study developed a low temperature solid-state direct bonding process for dissimilar metals. Experimental results show that Cu/Zn can be bonded successfully at 200°C under the loading of 10MPa for 30 minutes. The joints thus formed exhibited a shear strength up to 20MPa. If the thermal compression was performed at 300°C, the shear strength of bonded Cu/Zn and Cu/Ni/Zn joints exceeded 50MPa, especially for Cu/Zn joint, the strength even reached 70MPa. With respect to high temperature mechanical properties, due to the softening of Zn, the shear strength of all the joints decreased with a higher testing temperature. During aging at 250°C, the shear strength of Cu/Zn degraded drastically up to 500hr and after that the joint strength remained almost constant. The strength of Cu/Ni/Zn joints decreased gradually and maintained 30MPa for 500hr. The shear strength of both of the joints tended to be identical subjected to aging for 800hr. The deterioration of the joint strength during aging can be ascribed to the competitive growth between CuZn5 and Cu5Zn8 resulting in collapse and oxidation of CuZn5. The electroplated Ni and Ni5Zn21 thus formed can retard the excessive growth of Cu5Zn8 to some extent.
纯锌用于功率IC附件的热压缩键合
本研究开发了一种异种金属的低温固态直接键合工艺。实验结果表明,Cu/Zn在200°C下,在10MPa的载荷下,持续30分钟,可以成功地结合。节理抗剪强度可达20MPa。如果在300℃进行热压缩,Cu/Zn和Cu/Ni/Zn接头的剪切强度超过50MPa,特别是Cu/Zn接头的强度甚至达到70MPa。在高温力学性能方面,由于Zn的软化作用,随着测试温度的升高,所有接头的抗剪强度都有所下降。在250℃时效过程中,Cu/Zn的抗剪强度急剧下降,直至500hr,之后接头强度基本保持不变。Cu/Ni/Zn接头强度逐渐下降,500hr强度维持在30MPa。时效800hr后,两节理的抗剪强度趋于一致。时效过程中接头强度的下降可归因于CuZn5和Cu5Zn8之间的竞争生长导致CuZn5崩溃和氧化。由此形成的电镀Ni和Ni5Zn21能在一定程度上抑制Cu5Zn8的过度生长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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