Micro and Nano R&D Fab Safety, Inert Gas Reduction: A Lean Six-Sigma Approach

Abstract

This paper will present the lean six sigma approach that was utilized to identify and analyze factors critical to creating a safe work environment, while reducing the use of these inert gases within the MNST laboratories and cleanroom. After an inventory of all inert gas sources in MNST was conducted, actions were identified utilizing guidelines outlined in the CGA P-1-2008 pamphlet.2 This initiative revealed 10 improvements to be centered on elimination, controlling and safety protocol of inert gas usage. Initial results showed that there were 7400 (740 sources of inert gases x 10 possible actions) total possible opportunities throughout MNST. Out of the 7400 total possible opportunities, 1031 or 14% of the opportunities needed actions; 6369 needed no actions and were considered safe by the inert gas reduction team and 456 were listed as “Don't Know”. The “Don't Know” items were items that needed further clarification by EHS, engineering or facilities. Further scrutiny uncovered additional points, items and issues. Follow on projects concentrated on optimization and incorporated a control plan of monthly audits, a management of change process and training awareness programs.