Elimination of polyimide stress buffer on integrated circuits using advanced packaging materials

D. Patten, Jesse Phou
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引用次数: 1

Abstract

Polyimide is typically used as the final layer in silicon technology process integration. Its primary purpose is to protect the topside structures and relieve the interface of stresses introduced during and after encapsulation. However, developments in mold compound technology as well as in wafer fabrication techniques have caused the industry to re-evaluate the need for a polyimide stress buffer. Mold compound fillers have become finer and more spherical, reducing particulate pressure loading from the fillers on the die top surface. Additionally, the use of CMP in wafer fabrication reduces topographical variations, which result in less stress points on the die surface., This paper presents the evaluations that were conducted to assess the continued use of polyimide, and the effort made to eliminate if from some microelectronic packages. Moisture characterization data for several MAPBGA packages are included and package performance without polyimide is assessed. It was concluded that the removal of polyimide from these devices does not significantly affect the yields, but more work needs to be done to realize the limitations.
消除聚酰亚胺应力缓冲集成电路使用先进的封装材料
聚酰亚胺通常用作硅技术工艺集成的最后一层。其主要目的是保护上部结构,减轻封装期间和封装后产生的界面应力。然而,随着模具复合技术以及晶圆制造技术的发展,行业开始重新评估聚酰亚胺应力缓冲材料的需求。模具复合填料已变得更细,更球形,减少颗粒压力负载从填料在模具的顶部表面。此外,在晶圆制造中使用CMP可以减少地形变化,从而减少模具表面的应力点。本文介绍了为评估聚酰亚胺的持续使用而进行的评估,以及为从某些微电子封装中消除聚酰亚胺所做的努力。包括几种MAPBGA封装的水分表征数据,并评估了不含聚酰亚胺的封装性能。结果表明,从这些装置中去除聚酰亚胺对收率没有显著影响,但需要做更多的工作来认识其局限性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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