Failure Modes of Beam-Lead Semiconductors in Thin-Film Hybrid Microcircuits

J. Swafford
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引用次数: 2

Abstract

Beam-lead semiconductor and passive devices have been utilized in hybrid microcircuits (HMC) to provide higher reliability. This is derived from the beam-lead device's improved bonding integrity plus the silicon nitride coating which reduces sensitivity to contaminants; however, their size requires special handling techniques to prevent handling damage. Other failure modes exist such as cracked nitride, pinholes in the nitride, inadequate plating, and smeared metallization. After two years of production usage totaling approximately 150 000 devices, The Bendix Corporation's Kansas City Division has compiled significant data on beam-lead devices including small-signal and power discrete semiconductors and digital integrated circuits. These failure modes are characterized and precautionary measures are described to minimize failures in HMC usage.
薄膜混合微电路中导束半导体的失效模式
束引线半导体和无源器件已被用于混合微电路(HMC),以提供更高的可靠性。这源于束引线器件改进的键合完整性加上氮化硅涂层,降低了对污染物的敏感性;然而,他们的大小需要特殊的处理技术,以防止处理损坏。其它失效形式包括氮化物破裂、氮化物中有针孔、镀层不充分和金属化物涂污。经过两年的生产使用,总计约150,000个器件,Bendix公司的堪萨斯城分部已经收集了包括小信号和功率分立半导体和数字集成电路在内的波束引线器件的重要数据。这些故障模式的特征和预防措施描述,以尽量减少故障在HMC使用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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