L. Vancaillie, V. Kilchytska, P. Delatte, L. Demeus, H. Matsuhashi, F. Ichikawa, D. Flandre
{"title":"Peculiarities of the temperature behavior of SOI MOSFETs in the deep submicron area","authors":"L. Vancaillie, V. Kilchytska, P. Delatte, L. Demeus, H. Matsuhashi, F. Ichikawa, D. Flandre","doi":"10.1109/SOI.2003.1242906","DOIUrl":null,"url":null,"abstract":"In this paper, the temperature dependence of transistor fabricated in a thin film deep submicron SOI MOSFET fully depleted process, junction leakage current and transconductance were evaluated.","PeriodicalId":329294,"journal":{"name":"2003 IEEE International Conference on SOI","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2003 IEEE International Conference on SOI","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.2003.1242906","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
In this paper, the temperature dependence of transistor fabricated in a thin film deep submicron SOI MOSFET fully depleted process, junction leakage current and transconductance were evaluated.