New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring application

Abstract

In this communication we present a new and different approach based on electromagnetic transduction principle, which can be used for long distance covering pressure measurement. Previous work reported by the authors has validated the principle of the electromagnetic transduction for 400µm silicon membrane thickness and with the hypothesis of uniform vertical membrane displacement [1–2]. In this new report we investigate the effect of the silicon membrane thickness on electromagnetic transduction sensitivity. Moreover the completely passive wireless monitoring pressure micro-sensor is reported by taking into account the real deflection of the silicon membrane under pressure. This communication is focused only on the pressure measurement cell.